| 发明名称 |
Laser sputtering apparatus |
| 摘要 |
A laser sputtering apparatus comprising: a laser oscillator for emitting a pulsed laser beam; an optical unit for uniforming intensity of the laser beam; a vacuum tank which contains a target; and an optical system for irradiating the laser beam onto the target through the optical unit.
|
| 申请公布号 |
US5159169(A) |
申请公布日期 |
1992.10.27 |
| 申请号 |
US19900627931 |
申请日期 |
1990.12.14 |
| 申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
NISHIKAWA, YUKIO;YOSHIDA, YOSHIKAZU;TANAKA, KUNIO |
| 分类号 |
C23C14/34;B23K26/06;C23C14/28 |
主分类号 |
C23C14/34 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
