| 摘要 |
PURPOSE:To prevent nitridation irregularities from being formed on an article to be treated in the ion nitridation treatment apparatus according to glow discharge by rotating and revolving the article to be treated as a cathode in the apparatus. CONSTITUTION:A supply member 13 for a nitrogen gas as a treating gas is inserted into a gas tight tank 10 of the ion nitridation treatment apparatus and an opening 14 for discharging the gas is provided to a leaind end thereof. The article 27 to be treated is placed on a support jig 39 attached to a support structure 28 by an axis core 38. An interior of the gas tight tank 10 is evacuated by a vucuum exhausting apparatus 24 and the treating nitrogen gas from a gas supply source 20 is introduced. In the gas tight tank 10, a bell shaped anode 25 is provided and the support jig 39 as a cathode is rotated around the axis core 38 by rotating the shaft 29 by a motor 32 and revolved around the shaft 29 and the glow discharge is carried out between the anode 25 and the article 27 to be treated to subject said article to the ion nitridation treatment. By the rotation and the revolution of the article 27 to be treated, the effect same to the case wherein an electric field and the flow of the treating gas are uniform is generated and nitridation irregularities are eliminated. |
