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发明名称
ROTARY COATING METHOD AND APPARATUS OF THE SAME
摘要
申请公布号
JPH04300672(A)
申请公布日期
1992.10.23
申请号
JP19910064550
申请日期
1991.03.28
申请人
TOPPAN PRINTING CO LTD
发明人
NAKAMURA SEIJI
分类号
B05C5/00;B05C11/08;B05D1/40;G03F7/16;H01L21/027
主分类号
B05C5/00
代理机构
代理人
主权项
地址
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