| 摘要 |
PURPOSE:To provide a method for manufacturing an ionic current recording head in which carbonic adhesions attached to through pares for passage of the ionic current on occasion of making the pores by excimer laser can be removed by a simple processing. CONSTITUTION:A laminated body 30 is made by placing an organic solid insulating body 11 between first electrodes 12 and second electrodes 13, both of which are provided with a plurality of pores 14 on positions facing each other. Through pores 28 for passage of the ionic current are made for an ionic current recording head by making the aforementioned pores positioned facing each other communicated with each other. The making of the through pores is divided into two steps of processing, one is for making of the through pores 28 for passage of the ionic current piercing the aforementioned organic solid insulating body 11 by irradiating excimer laser either from the side of the first electrodes or the side of the second electrodes to pores 14 formed in both of electrodes, and another is for irradiation of high frequency plasma to the aforementioned through pores 28 for passage of the ionic current. |
