DEVICE FOR MEASURING THERMAL CONSTANT OF THIN FILM,申请号JP19910062874-传众专利搜索

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发明名称	DEVICE FOR MEASURING THERMAL CONSTANT OF THIN FILM
摘要
申请公布号	JPH04296644(A)	申请公布日期	1992.10.21
申请号	JP19910062874	申请日期	1991.03.27
申请人	HITACHI LTD	发明人	NAKAGAWA HIROKO;NAKAMURA SHIGERU;TAKAHASHI MASAHIKO;MIYAMOTO JIICHI
分类号	G01N25/18	主分类号	G01N25/18
代理机构		代理人
主权项
地址

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