NEUTRAL PARTICLE ENERGY ANALYZER

摘要

PURPOSE:To solve problems of a fixing space, fixing dimension and the like by detecting different energy of charged particles by the use of one charged particle detector. CONSTITUTION:On an output side of a charged particle exchanger, there are provided a pair of magnets 21 having deflection sides of an almost quadratic curve in order to deflect charged particles according to their energy so as to converge them to one point through different orbits. One detector 27 is disposed on a convergent point of the charged particle, for detection of the charged particle having different energy.