| 摘要 |
<p>PURPOSE:To offer an electrostatic chuck, which is simple in structure, has a sufficient attracting force even at a temperature higher than 200 deg.C and can be actuated even in a low voltage. CONSTITUTION:PbTiO3 ceramic, such as PbTiO3-La2O3 (30mol% or lower of La2O3), PbTiO3-BaTiO3 (90mol% or lower of BaTiO3), PbTiO3-La2O3.2 TiO2 (30mol% or lower of La2O3.2 TiO2) or PbTiO3-SrTiO3 (90mol% or lower of SrTiO3), or the right formula (in the formula, (x) is the number of 0 to 0.15, (y) is the number of 0.5 to 0.7 and (z) is the number of 0.3 to 0.4, and y+z=1) is used in the manufacture of a dielectric 1.</p> |
