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发明名称
PROCESS MODULE DISPENSE ARM
摘要
申请公布号
US5156681(A)
申请公布日期
1992.10.20
申请号
US19910705834
申请日期
1991.05.28
申请人
EATON CORPORATION
发明人
HARLAN, JOHN M.
分类号
H01L21/304;H01L21/00;H01L21/027
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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