| 摘要 |
PURPOSE:To offer the method for producing an aluminum nitride substrate having high insulation resistance, especially as high as >10<13>OMEGA.cm. CONSTITUTION:In the production process of an aluminum nitride substrate from aluminum nitride powder, alumina powder and carbon powder as the main source material, the carbon powder used has 1-10mum average particle diameter and the adding amt. of the carbon powder is specified to the range represented by an area A-B-C-D in figure 1. This method gives a significant effect to easily produce an aluminum nitride substrate having not only good thermal conductivity but >1013OMEGA.cm insulation resistance. As a result, this production method requires no inspection or selecting process and gives a higher yield compared to a conventional method which causes large variation in insulating resistance of products. Moreover, while a low oxygen-contg. AIN powder alone is used as the source material by the conventional method considering the thermal conductivity of the substrate, by this method, such a kind of problem can be eliminated. |
