POSITIONING METHOD FOR WAFER

摘要

PURPOSE:To provide a wafer positioning apparatus and a method which carries out the positioning of a wafer having a plurality of orientation flats with reference to a particular orientation flat. CONSTITUTION:A wafer positioning method for realizing positioning with reference to a particular orientation flat 9a of a plurality of orientation flats 9a provided on a wafer detects the position of a particular orientation flat 9a of a plurality of flats 9a using a wafer positioning apparatus, obtains the center of this orientation flat 9a and carries out positioning of the wafer with reference to this center.