METHOD AND APPARATUS FOR GENERATION OF PLASMA,申请号JP19910054527-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR GENERATION OF PLASMA
摘要
申请公布号	JPH04290226(A)	申请公布日期	1992.10.14
申请号	JP19910054527	申请日期	1991.03.19
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	OKUNI MITSUHIRO;NOMURA NOBORU;KUBOTA MASABUMI;TAMAOKI NORIHIKO;NAKAYAMA ICHIRO
分类号	C23F4/00;H01L21/302;H01L21/3065;H05H1/46	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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