PHOTO EXCITED ETCHING METHOD,申请号JP19910051779-传众专利搜索

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发明名称	PHOTO EXCITED ETCHING METHOD
摘要
申请公布号	JPH04287320(A)	申请公布日期	1992.10.12
申请号	JP19910051779	申请日期	1991.03.16
申请人	FUJITSU LTD	发明人	KURODA SHIGERU
分类号	H01L21/302	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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