PRODUCTION OF THIN SUPERCONDUCTING FILM

摘要

PURPOSE:To produce a thin superconducting film having high crystallinity on a semiconductor substrate with high adhesion. CONSTITUTION:A calcium fluoride crystal layer 2 is formed on a semiconductor substrate 1 of Si or GaAs or a molybdenum sulfide or niobium sulfide crystal layer 4 is further formed on the layer 2. A thin superconducting film 3 is then produced on the layer 2 or 4 by hetero epitaxial growth.