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发明名称
METAL WIRING FORMING METHOD FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04278537(A)
申请公布日期
1992.10.05
申请号
JP19910040263
申请日期
1991.03.06
申请人
NIPPONDENSO CO LTD
发明人
KATO YUJI;FUJII TETSUO
分类号
H01L21/28;H01L21/3205;H01L21/768
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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