MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19910036363-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH04274337(A)	申请公布日期	1992.09.30
申请号	JP19910036363	申请日期	1991.03.01
申请人	MITSUBISHI ELECTRIC CORP	发明人	HIGUCHI TOKUMASA
分类号	H01L21/56;H01L21/60	主分类号	H01L21/56
代理机构		代理人
主权项
地址

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