| 摘要 |
PURPOSE:To reduce the size of the optical scanning element and improve its productivity by forming a curved waveguide which varies in curvature gradually in the propagation direction of light on a substrate and using a heating means, for this waveguide. CONSTITUTION:The optical scanning element uses soda glass which has large thermo-optic effect as its substrate 12 and consists of a K<+> ion exchange waveguide 14 formed by exchanging Na<+> ions of the soda glass with K<+> ions and a heater 16 made of Ti, etc., thereupon across a buffer layer 15. The K<+> ion exchange waveguide 14 consists of a straight optical waveguide 18 and the curved waveguide 20, which is formed increasing in curvature gradually in the propagation direction of the light. The temperature of the waveguide 20 drops slightly at the part where the curvature is large and the curved waveguide 20 only decreases in refractive index slightly and can not confine the light, which is emitted. At the part where the curvature is small, on the other hand, the light is not emitted unless the decrease in refractive index is made large by lowering the temperature of the curved waveguide 20. Namely, the emission position of the light can be controlled by controlling the temperature. |
