METHOD AND APPARATUS FOR ALIGNING SILICON WAFERS,申请号EP19880906274-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR ALIGNING SILICON WAFERS
摘要
申请公布号	EP0365589(B1)	申请公布日期	1992.09.23
申请号	EP19880906274	申请日期	1988.05.23
申请人	HINE DESIGN INC.	发明人	HINE, DEREK, L.
分类号	B65G1/07;B65G47/14;B65G47/90;B65G49/07;H01L21/68	主分类号	B65G1/07
代理机构		代理人
主权项
地址

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