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发明名称
EXPOSER
摘要
申请公布号
JPH04267243(A)
申请公布日期
1992.09.22
申请号
JP19910028331
申请日期
1991.02.22
申请人
NEC CORP
发明人
YOSHIOKA NAOTO
分类号
G03B27/72;G03F7/20;H01L21/027;H01L21/30
主分类号
G03B27/72
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代理人
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