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发明名称
CHARGED-PARTICLE BEAM APPARATUS
摘要
申请公布号
US5149967(A)
申请公布日期
1992.09.22
申请号
US19900594947
申请日期
1990.10.10
申请人
HITACHI, LTD.
发明人
OTAKA, TADASHI
分类号
H01J37/20;H01J37/26
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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