摘要 |
<p>PURPOSE:To convert fluorine-contg. gas discharged in an untreated state into harmless gas by treatment when fluorine-contg. gases used or generated in various chemical processes. CONSTITUTION:Fluorine-contg. gas to be treated is decomposed by plasma discharge. In this discharge treatment, at least one of Na, K, Mg, Ca, Sr, Ba, Al, Fe, Ni, Cr, Cu, Zn, Si and C, alloys of such elements or inorg. compds. of the elements is put in the plasma discharge region. The fluorine-contg. gas can be made harmless.</p> |