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发明名称
CHEMICAL VAPOR GROWTH METHOD
摘要
申请公布号
JPH04263072(A)
申请公布日期
1992.09.18
申请号
JP19910004296
申请日期
1991.01.18
申请人
MITSUBISHI ELECTRIC CORP
发明人
TSUTSUMI TOSHIAKI
分类号
C23C16/06;C23C16/44;C23C16/455;H01L21/205;H01L21/285
主分类号
C23C16/06
代理机构
代理人
主权项
地址
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