| 摘要 |
<p>The array of field emission cathodes of the type in which each element is made up of a substrate serving as a first electrode (1) comprises an insulating layer (2) in which a cavity (6) is formed, a cathode (9) formed in said cavity (6) and on the first electrode (1), and a second electrode (3) formed on the insulating layer (2). The second electrode (3) is coated with a protective metal layer (13) having good conductivity and corrosion resistance. The second electrode (3), i.e. the gate electrode is thus protected from oxidation and permits stable electron emission. Also disclosed is an array of field emission cathodes in which each element is made up of a first electrode (11) to apply voltage to a plurality of cathodes (9), a resistance layer (12), an insulating layer (2), and a second electrode (3) which are formed on top of the other. A cavity (6) is formed in the second electrode (3), i.e. the gate electrode and the insulating layer (2), and a cathode (9) is placed in each cavity (6) and on the resistance layer (12), with the first electrode (11) having a void under the respective cathode (9). This structure prevents short circuits between the cathode (9) and the gate electrode (3), which contributes to high yields and long life. <IMAGE></p> |
