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发明名称
SEMICONDUCTOR DEVICE HAVING U-GROOVE
摘要
申请公布号
US5148257(A)
申请公布日期
1992.09.15
申请号
US19900627034
申请日期
1990.12.13
申请人
NEC CORPORATION
发明人
KISHI, SHUJI
分类号
H01L21/321;H01L21/763
主分类号
H01L21/321
代理机构
代理人
主权项
地址
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