发明名称 Semiconductor device having junction structure of a plurality of element isolation regions
摘要 This invention relates to a junction structure in which element isolation regions having different shapes (e.g., isolation regions respectively formed by a trench isolation method and a LOCOS method) for electrically isolating an element region formed on a semiconductor substrate are bonded to each other. A LOCOS isolation region made of an insulator for electrically isolating many circuit elements of an element region formed on a semiconductor substrate is formed. An end portion of the insulating trench isolation region bonded to the LOCOS isolation region is formed to have a sectorial shape. When a side serving as an end portion of the LOCOS isolation region is bonded to tapered sides of the sectorial portion of the trench isolation region to cause the tapered sides to cross and overlap each other, an included angle serving as an angle defined by these isolation regions on the element region is an obtuse angle.
申请公布号 US5148258(A) 申请公布日期 1992.09.15
申请号 US19900633801 申请日期 1990.12.26
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 MORITA, SHIGERU
分类号 H01L21/76;H01L21/31;H01L21/762 主分类号 H01L21/76
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