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经营范围
发明名称
PERIPHERAL EXPOSURE METHOD
摘要
申请公布号
JPH04258113(A)
申请公布日期
1992.09.14
申请号
JP19910019730
申请日期
1991.02.13
申请人
TOKYO ELECTRON LTD;TOUKIYOU EREKUTORON KIYUUSHIYUU KK
发明人
YAMAHIRA YUTAKA;YOSHIOKA KAZUTOSHI;TAKEKUMA TAKASHI
分类号
H01L21/30;H01L21/027
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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