APPARATUS AND METHOD FOR ANALIZING CRYSTAL GROWING STEP AND EVALUATING APPARATUS THEREOF

摘要

PURPOSE:To obtain the data of the atomic layer of the outermost surface of a growing crystal by attaching an electron energy analyzer which can detect photoelectrons of the surface of solid at a specified angle so that a specified vacuum degree is maintained. CONSTITUTION:Emitted light 1 whose energy can be varied is introduced into a crystal growing device and cast on the surface of a solid sample 2 whose crystal is growing. A molecular beam is applied on the surface of the sample 2 from a crystal growing vapor deposition source 5, and the crystal growing in the order of an atomic layer is performed. Photoelectrons 6 discharged from the surface of the sample 2 are detected with an electron energy analyzer 8 having the angle decomposing function at an angle which is close to the surface. The detected spectral light is accumulated in a data memory device 11 through a photoelectron-measurement control device 10. After the end of the measurement, the spectra are overlapped and displayed on a CRT display 12. At this timer an orifice and a differential exhausting system are provided in order to maintain the difference in vacuum degrees in the analyzing chamber and the analyzer 8.