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发明名称
ADJUSTING METHOD OF POSITION OF PROBE CARD
摘要
申请公布号
JPH04256331(A)
申请公布日期
1992.09.11
申请号
JP19910017918
申请日期
1991.02.08
申请人
NEC CORP
发明人
MIYAGI YUJI
分类号
G01R31/26;H01L21/66
主分类号
G01R31/26
代理机构
代理人
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