RADIATION-SENSITIVE COMPOSITION

摘要

PURPOSE:To obtain a radiation-sensitive compsn. not swellable with a developing soln., having high resolution and suitable for use as a resist compsn. fit for irradiation with various radial rays. CONSTITUTION:This radiation-sensitive compsn. contains a phenolic polymer contg. partially allylated hydroxyl groups and a radiation-sensitive acid forming agent. The number of allyloxy groups contained in the phenolic polymer is 0.1-2.0, preferably 0.3-1.2 times as large as the number of phenolic hydroxyl groups usually contained in the polymer. The phenolic polymer contains 5-37wt.%, preferably 10-30wt.% hydroxyl and allyloxy groups.