JOSEPHSON JUNCTION DEVICE AND MANUFACTURE OF JOSEPHSON INTEGRATED CIRCUIT

摘要

PURPOSE: To provide a method for fabricating a high quality Josephson integrated circuit by removing the effect of irregularities on the surface of a substrate. CONSTITUTION: The method for fabricating a high quality Josephson integrated circuit comprises a step for forming a three layer Josephson junction by depositing various material layers, a step for forming a plurality of three layer regions 22-24 by etching, and a step for providing a plane coplanar to the upper surface of a three layer region for subsequent interconnection by planarizing a dielectric material through chemical mechanical polishing. This method solves the problems of a low quality Josephson junction, low Vm, and cracking or gap in the upper coplanar plane between the three layer region and the surrounding dielectric material.