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发明名称
HALOGEN-COMPATIBLE HIGH-FREQUENCY DISCHARGE APPARATUS
摘要
申请公布号
EP0457745(A3)
申请公布日期
1992.09.02
申请号
EP19910850123
申请日期
1991.05.14
申请人
POTOMAC PHOTONICS, INC.
发明人
CHRISTENSEN, PAUL, C.
分类号
H01J65/04;H01J61/30;H01J65/00;H01S3/03;H01S3/097;(IPC1-7):H01J61/30
主分类号
H01J65/04
代理机构
代理人
主权项
地址
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