THIN FILM RESISTOR AND METHOD FOR PRODUCING SAME

摘要

A planar film resistor (28) is described that is trimmable by a laser beam. A pair of electrodes (30, 32) are spaced apart on a substrate and make contact with a film of resistive material disposed therebetween. The resistive material includes a laser produced trim region (40) disposed internally to all boundaries of the resistive material, and extends through the thickness of said film. The trim region has an elongated dimension which is orthogonal to the most direct current path between the electrodes. In a preferred embodiment, the resistive material is covered by a passivating layer (34) and is trimmed after the passivating layer is in place.