发明名称 METHOD FOR MANUFACTURING AND CONSTRUCTION OF A PRESSURE DETECTOR
摘要 1. Pressure pick-up, having in its base an immobile electrode, connected - via current conducting tracks - with the assembly field; and also a chamber, a membrane with the adjoining mobile electrode, connected - via current conducting tracks - with the assembly field, and also insulated passive areas of the instrument, on which assembly fields rest, characterized in that the silicon nitride membrane (28) and at least one penetration area (10) are situated on the same side of the base (1).<IMAGE>
申请公布号 PL158256(B1) 申请公布日期 1992.08.31
申请号 PL19870269543 申请日期 1987.12.18
申请人 发明人
分类号 G01L;G01L9/00;(IPC1-7):G01L9/00 主分类号 G01L
代理机构 代理人
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