摘要 |
1. Pressure pick-up, having in its base an immobile electrode, connected - via current conducting tracks - with the assembly field; and also a chamber, a membrane with the adjoining mobile electrode, connected - via current conducting tracks - with the assembly field, and also insulated passive areas of the instrument, on which assembly fields rest, characterized in that the silicon nitride membrane (28) and at least one penetration area (10) are situated on the same side of the base (1).<IMAGE>
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