发明名称 SURFACE PLATE FOR POLISHING
摘要 PURPOSE:To provide a surface plate for polishing, with which shortening of the finish grind time is made practicable. CONSTITUTION:The body of a polishing surface plate is made of acrylic resin. A Cu sheet is provided on the oversurface of the body of this surface plate. The Cu sheet shall be so thin as allowing the force, etc., applied by a wire to be transmitted directly to the body of the surface plate.
申请公布号 JPH04240068(A) 申请公布日期 1992.08.27
申请号 JP19910005281 申请日期 1991.01.21
申请人 FUJITSU LTD 发明人 HOSOYA TADAO
分类号 B24B37/12;B24B37/14;B24B37/16 主分类号 B24B37/12
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