摘要 |
PURPOSE:To provide a surface plate for polishing, with which shortening of the finish grind time is made practicable. CONSTITUTION:The body of a polishing surface plate is made of acrylic resin. A Cu sheet is provided on the oversurface of the body of this surface plate. The Cu sheet shall be so thin as allowing the force, etc., applied by a wire to be transmitted directly to the body of the surface plate. |