MULTILAYER DIELECTRIC FILM

摘要

PURPOSE:To provide a multilayer dielectric film for a capacitor which becomes a high dielectric constant by preventing formation of an SiO2 film having a low dielectric constant on an Si substrate. CONSTITUTION:A non-oxidation dielectric film 2 which becomes higher dielectric constant than that of an SiO2 is formed as an oxidation preventive film of an Si substrate on a first layer on the substrate 1, and an oxidation dielectric film 3 which becomes higher dielectric constant than that of the SiO2 is formed as a second layer on the first layer.