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发明名称
DEFECT INSPECTING DEVICE
摘要
申请公布号
JPH04238255(A)
申请公布日期
1992.08.26
申请号
JP19910005908
申请日期
1991.01.22
申请人
TOSHIBA CORP
发明人
SUZUKI HIROMI
分类号
G01N21/88;G01N21/94;G01N21/956;H01L21/66;H04N7/18
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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