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发明名称
PLANAR SHAPE MEASURING METHOD
摘要
申请公布号
JPH04238210(A)
申请公布日期
1992.08.26
申请号
JP19910019194
申请日期
1991.01.21
申请人
MITSUBISHI HEAVY IND LTD
发明人
SHIMAZUTSU HIROAKI;MASUDA KENJI;YANAGI KENICHI
分类号
G01B21/30
主分类号
G01B21/30
代理机构
代理人
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地址
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