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发明名称
METHOD AND APPARATUS FOR GROWING SEMICONDUCTOR CRYSTAL
摘要
申请公布号
JPH04238898(A)
申请公布日期
1992.08.26
申请号
JP19900415627
申请日期
1990.12.28
申请人
FUJITSU LTD
发明人
KATO KIYOKO;KUSUKI TOSHIHIRO
分类号
C30B19/00;C30B29/40
主分类号
C30B19/00
代理机构
代理人
主权项
地址
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