发明名称 PELLICLE
摘要 PURPOSE:To provide the pellicle superior in light resistance and free from occurrences of dust and uneven adhesion. CONSTITUTION:The pellicle comprises a pellucle frame and a pellicle film set up on one side with the frame and coated on the other side with a hot melt adhesive comprising a block copolymer consisting of both side blocks of styrene polymers and a middle block of an ethylene-butylene copolymer or ethylene-propylene copolymer, an aliphatic petroleum resin, and a liquid paraffin and having a melt viscosity of <=10000psc.
申请公布号 JPH04237056(A) 申请公布日期 1992.08.25
申请号 JP19910081037 申请日期 1991.01.21
申请人 DAICEL CHEM IND LTD 发明人 YAMAKI KAORU;KURODA TAKAYUKI
分类号 C09J153/00;C09J191/00;C09J193/00;G03F1/62;H01L21/027 主分类号 C09J153/00
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