CANTILEVER FOR SCANNING TYPE PROBE MICROSCOPE AND MANUFACTURE THEREOF

摘要

PURPOSE:To provide a cantilever provided with a probe part having a sharp tip and proper length. CONSTITUTION:A cantilever 40 for a scanning type probe microscope is equipped with a lever part 40 and the probe part 42 arranged on the free end side thereof. The probe part 42 consists of a conical tip part 45 having a sharp tip angle and the expanded base end part 44 continued to the tip part 45. The cantilever 40 is prepared by utilizing a semiconductor process.