| 摘要 |
PURPOSE:To provide an oxygen sensor using a solid electrolyte which is compact and light-weight and operates at ordinary temperatures without requiring a reference gas source. CONSTITUTION:Two silicon wafers 1, 7 are bonded together. The silicon wafers 1, 7 have diaphragm parts 2, 8 with many minute holes 2a, 8a, respectively. Layers 3, 9 of a solid electrolyte and electrodes 4, 10 are formed on the corresponding diaphragm parts 2, 8. Moreover, electrodes 5, 11 are formed in a cell in the diaphragm parts. A hole 12 is formed in the silicon wafer 7 to penetrate into the cell. |
