COATING METHOD AND COATING DEVICE,申请号JP19910167794-传众专利搜索

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发明名称	COATING METHOD AND COATING DEVICE
摘要
申请公布号	JPH04230016(A)	申请公布日期	1992.08.19
申请号	JP19910167794	申请日期	1991.06.12
申请人	BATTELLE INST EV	发明人	GIDO CHIYURENA
分类号	B05C11/08;B05D1/40;G03F7/16;H01L21/027;H01L21/28	主分类号	B05C11/08
代理机构		代理人
主权项
地址

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