发明名称 VACUUM APPARATUS FOR COATING AN OPTICAL SUBSTRATE
摘要 In a vacuum vapor deposition apparatus for coating one side of an optical substrate in an evacuable container, above at least one vapor source, a rotatable support structure is provided. The support structure includes a plurality of at least approximately circular segment-shaped pivotable support plates which are positionable cup-like relative to each other and are supported on a common rotating axle, each pivotable about 180 DEG . Each of the pivotable support plates has support areas on both sides with mechanisms for clamping securely substrates which are to be coated on one side and which sit on the respective supporting areas.
申请公布号 US5138974(A) 申请公布日期 1992.08.18
申请号 US19910704079 申请日期 1991.05.22
申请人 SATIS VACUUM AG 发明人 CIPARISSO, DELIO
分类号 C23C14/50 主分类号 C23C14/50
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