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发明名称
MASK FOR THIN FILM DEPOSITION APPARATUS
摘要
申请公布号
KR920005620(Y1)
申请公布日期
1992.08.17
申请号
KR19890017574U
申请日期
1989.11.27
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
YOM, HUNG - SO
分类号
H01L21/308;(IPC1-7):H01L21/308
主分类号
H01L21/308
代理机构
代理人
主权项
地址
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