FORMATION OF METAL PLUG,申请号JP19900414949-传众专利搜索

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发明名称	FORMATION OF METAL PLUG
摘要
申请公布号	JPH04225549(A)	申请公布日期	1992.08.14
申请号	JP19900414949	申请日期	1990.12.27
申请人	SONY CORP	发明人	SATO JUNICHI
分类号	H01L21/28;H01L21/3205;H01L21/768;H01L23/522	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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