发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD.
摘要 <p>In the structure of a memory using a ferroelectric film, by embedding a capacitor formed with the ferroelectric film in a throughhole provided in an interlayer insulating film formed on a semiconductor substrate, a semiconductor memory of high reliability can be obtained, improving the reliability of the wiring layer on the capacitor by reducing the step arising from the capacitor. <IMAGE></p>
申请公布号 EP0497982(A1) 申请公布日期 1992.08.12
申请号 EP19910913102 申请日期 1991.07.24
申请人 SEIKO EPSON CORPORATION 发明人 KATO, KOJI
分类号 H01L27/112;H01L21/8246;H01L27/115 主分类号 H01L27/112
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