Marking method and apparatus

摘要

In performing markings in semiconductor manufacturing devices, the positional discrepancy between printing plate and plate holder is first detected by a camera. After correcting such a discrepancy, the printing plate is positionally fixed and then printing is performed. The printing plate is rotated and moved horizontally in any directions when positional discrepancy is detected and corrected, and an image signal of such positional discrepancy supplied from the camera which is set to face the plate holder is processed to be shown on a monitor for executing correction of the discrepancy.