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发明名称
MANUFACTURE OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH04219923(A)
申请公布日期
1992.08.11
申请号
JP19900413847
申请日期
1990.12.19
申请人
SANYO ELECTRIC CO LTD
发明人
OGATA HIDEKANE
分类号
C30B1/04;H01L21/20;H01L21/84
主分类号
C30B1/04
代理机构
代理人
主权项
地址
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