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发明名称
VAPOR GROWTH METHOD FOR SEMICONDUCTOR CRYSTAL
摘要
申请公布号
JPH04212415(A)
申请公布日期
1992.08.04
申请号
JP19910056236
申请日期
1991.01.31
申请人
TOSHIBA CORP
发明人
SASAKI MASAHIRO;KAWAHISA YASUTO;ISHIKAWA HIROCHIKA;MASHITA MASAO
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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