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发明名称
PHOTORESIST COATING DEVICE FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04213815(A)
申请公布日期
1992.08.04
申请号
JP19900401234
申请日期
1990.12.11
申请人
NEC YAMAGATA LTD
发明人
KATO KENICHI
分类号
B05C11/08;H01L21/027
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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