发明名称 SCANNING CHIP
摘要 PURPOSE: To provide a high-quality tip with its superior friction resistance by forming a scanning tip operating by a tunnel current out of a boron doped diamond. CONSTITUTION: A scanning tip 1 scanning a surface by a tunnel current comprises a cylindrical grip part 3 and a sphere-shaped tip end 5 and is formed by employing a boron-doped diamond. Since the diamond is made of a hard material, a sharp tip end can be easily formed, and conductivity can be provided on a surface by doping boron. Further, a preferable direction of a crystalline face such as a crystalline face orthogonal 110 to a longitudinal axis of the tip 1 is selected and formed. Thereby, a high-quality scanning tip having its strong mechanical damage resistance and superior effective service life can be provided.
申请公布号 JPH04212251(A) 申请公布日期 1992.08.03
申请号 JP19910011608 申请日期 1991.01.08
申请人 PHILIPS GLOEILAMPENFAB:NV 发明人 YOHANESU MASHIASU OOMEN;YOHANESU YAKOBUSU BAARUBERUHEN;UIHIERUTO MESUMAN;HENDORITSUKU KARERU MORAARU
分类号 C23C14/06;C23C14/34;G01B7/34;G01L5/00;G01N27/00;G01N37/00;G01Q60/16;G01Q70/14;H01J31/28;H01J37/28 主分类号 C23C14/06
代理机构 代理人
主权项
地址